P

Inventor

ELGHAZZALI MOHAMED

AT7 patents
⚠️ This page may combine multiple inventors who share the name “ELGHAZZALI MOHAMED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EVATEC AG

3 patents
US10388559B2Aug 20, 2019

Apparatus for depositing a layer on a substrate in a processing gas

EVATEC AG13 citations80
US11380530B2Jul 5, 2022

Reactive sputtering with HIPIMS

EVATEC AG2 citations71
US11387079B2Jul 12, 2022

Plasma etch chamber and method of plasma etching

EVATEC AG0 citations41

WEICHART JUERGEN

2 patents
US10784092B2Sep 22, 2020

Reactive sputtering with HIPIMs

WEICHART JUERGEN2 citations70
US8691058B2Apr 8, 2014

Apparatus for sputtering and a method of fabricating a metallization structure

WEICHART JUERGEN0 citations46

OERLIKON ADVANCED TECH AG

1 patent
US9644261B2May 9, 2017

Apparatus for sputtering and a method of fabricating a metallization structure

OERLIKON ADVANCED TECH AG12 citations78

RIESCHL SVEN UWE

1 patent
US9490166B2Nov 8, 2016

Apparatus and method for depositing a layer onto a substrate

RIESCHL SVEN UWE3 citations63