P

Inventor

WEI JING

CN33 patents
⚠️ This page may combine multiple inventors who share the name “WEI JING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD

9 patents
US11615942B2Mar 28, 2023

Control method of radiofrequency source

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD4 citations73
US10886105B2Jan 5, 2021

Impedance matching method, impedance matching device and plasma generating apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD3 citations73
US10699881B2Jun 30, 2020

Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD6 citations69
US11114281B2Sep 7, 2021

Method and device for radio frequency impedance matching, and semiconductor processing apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations62
US11749502B2Sep 5, 2023

System and method for pulse modulation of radio frequency power supply and reaction chamber thereof

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations52
US12300460B2May 13, 2025

Power adjustment method of upper electrode power supply and semiconductor process apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations51
US11056316B2Jul 6, 2021

Radio frequency pulse matching method and device thereof and pulsing plasma generation system

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations50
US12266507B2Apr 1, 2025

Impedance-matching method, impedance-matching device, and semiconductor process apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations45
US12394593B2Aug 19, 2025

Power control method and device of lower radio frequency power supply and semiconductor processing equipment

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations43

HEFEI INST PHYSICAL SCI CAS

7 patents

YANGTZE MEMORY TECH CO LTD

5 patents

HEILONGJIANG FEIHE DAIRY CO LTD

3 patents

SYNGENTA PARTICIPATIONS AG

2 patents

SCRIPPS RESEARCH INST

1 patent

WEI JING

1 patent

UNIV CHONGQING

1 patent

HONEYWELL INT INC

1 patent

TANG CHUYANG

1 patent

ZHANG ZHONGTAO

1 patent

BAOSHAN IRON & STEEL

1 patent