Inventor
UOZUMI SHUJI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “UOZUMI SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS11517940B2Dec 6, 2022
Substrate cleaning device
EBARA CORP0 citations61
US12472601B2Nov 18, 2025
Method of checking leakage of fluid and polishing apparatus
EBARA CORP0 citations60
US12181345B2Dec 31, 2024
Method of calibrating radiation thermometer and system thereof
EBARA CORP0 citations60
US11826871B2Nov 28, 2023
Pad-temperature regulating apparatus, pad-temperature regulating method, and polishing apparatus
EBARA CORP0 citations60
US11383345B2Jul 12, 2022
Cleaning apparatus for heat exchanger and polishing apparatus
EBARA CORP1 citations60
US12368059B2Jul 22, 2025
Substrate cleaning apparatus, substrate processing apparatus, substrate cleaning method, device manufacturing method, and non-transitory computer readable medium
EBARA CORP0 citations50
US11992915B2May 28, 2024
System for adjusting pad surface temperature and polishing apparatus
EBARA CORP0 citations50