Inventor
JUNG JIN-HANG
KR3 patents
Patents
3 patentsUS6398430B1Jun 4, 2002
Semiconductor device fabrication system
SAMSUNG ELECTRONICS CO LTD19 citations90
US6358672B2Mar 19, 2002
Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresist
SAMSUNG ELECTRONICS CO LTD24 citations90
US6074944AJun 13, 2000
Methods for priming wafers employed in integrated circuit devices using dihydropyrane
SAMSUNG ELECTRONICS CO LTD1 citations48