Inventor

WU YAW-WEN

TW2 patents

Patents

2 patents

US6541787B2Apr 1, 2003

Optically aligning a loadport on a process machine by transmitting light through a system of apertures

TAIWAN SEMICONDUCTOR MFG7 citations65

US6732442B2May 11, 2004

Precise mechanism for load port adjustment

TAIWAN SEMICONDUCTOR MFG3 citations52