Inventor
TSAI CHIA-FU
TW3 patents
Patents
3 patentsUS7001098B2Feb 21, 2006
Lock structure and method for using thereof
TAIWAN SEMICONDUCTOR MFG24 citations86
US6541787B2Apr 1, 2003
Optically aligning a loadport on a process machine by transmitting light through a system of apertures
TAIWAN SEMICONDUCTOR MFG7 citations65
US6732442B2May 11, 2004
Precise mechanism for load port adjustment
TAIWAN SEMICONDUCTOR MFG3 citations52