Inventor
NETZER MARTIN
AT12 patents
Patents
12 patentsUS10738895B2Aug 11, 2020
Vacuum valve
VAT HOLDING AG3 citations71
US12422056B2Sep 23, 2025
Valve, in particular a vacuum valve
VAT HOLDING AG2 citations69
US11282725B2Mar 22, 2022
Wafer transfer unit and wafer transfer system
VAT HOLDING AG5 citations69
US10156299B2Dec 18, 2018
Vacuum valve for controlling a flow and for interrupting a flow path
VAT HOLDING AG6 citations69
US9851012B2Dec 26, 2017
Vacuum valve seal
VAT HOLDING AG6 citations68
US11460113B2Oct 4, 2022
Gate valve with sliding guide
VAT HOLDING AG1 citations60
US11131394B2Sep 28, 2021
Closure device mounted to a cylinder-piston drive unit displaceable yoke
VAT HOLDING AG0 citations60
US10770326B2Sep 8, 2020
Positioning device, loading and/or unloading system and method for operating a positioning device
VAT HOLDING AG1 citations60
US12106987B2Oct 1, 2024
Safeguarding device, wafer transport container with at least one safeguarding device, safeguarding system and method with the safeguarding device
VAT HOLDING AG0 citations50
US12241556B2Mar 4, 2025
Vacuum valve for providing a symmetrical fluid flow
VAT HOLDING AG0 citations48
US11906066B2Feb 20, 2024
Seal support ring for a valve
VAT HOLDING AG0 citations48
US10738896B2Aug 11, 2020
Vacuum valve
VAT HOLDING AG0 citations39