Inventor
CHIBA RYO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “CHIBA RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS10388558B2Aug 20, 2019
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US11538715B2Dec 27, 2022
Stage and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US10910252B2Feb 2, 2021
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations60
US12033886B2Jul 9, 2024
Plasma processing apparatus and method for manufacturing mounting stage
TOKYO ELECTRON LTD0 citations49