Inventor

GABOR ALLEN

US2 patents

Patents

2 patents

US11239077B2Feb 1, 2022

Litho-etch-litho-etch with self-aligned blocks

IBM2 citations71

US12455505B2Oct 28, 2025

Method for forming continuous line-end to line-end spaces with spacer assisted lithography-etch-lithography etch processes

IBM0 citations45