Inventor
HISAMATSU MASAYA
JP5 patents
Patents
5 patentsUS5863412AJan 26, 1999
Etching method and process for producing a semiconductor element using said etching method
CANON KK95 citations97
US6051116AApr 18, 2000
Etching apparatus
CANON KK56 citations95
US5993637ANov 30, 1999
Electrode structure, electrolytic etching process and apparatus
CANON KK69 citations95
US6491808B2Dec 10, 2002
Electrolytic etching method, method for producing photovoltaic element, and method for treating defect of photovoltaic element
CANON KK13 citations73
US11598902B2Mar 7, 2023
Optical member, optical apparatus, imaging apparatus, and manufacturing method of optical member
CANON KK0 citations59