Inventor
COLLINS KENNETH
US19 patents
⚠️ This page may combine multiple inventors who share the name “COLLINS KENNETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS6036878AMar 14, 2000
Low density high frequency process for a parallel-plate electrode plasma reactor having an inductive antenna
APPLIED MATERIALS INC259 citations99
US6444084B1Sep 3, 2002
Low density high frequency process for a parallel-plate electrode plasma reactor having an inductive antenna
APPLIED MATERIALS INC80 citations98
US6252354B1Jun 26, 2001
RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control
APPLIED MATERIALS INC337 citations98
US6074512AJun 13, 2000
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC236 citations98
US6054013AApr 25, 2000
Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density
APPLIED MATERIALS INC596 citations98
US6238588B1May 29, 2001
High pressure high non-reactive diluent gas content high plasma ion density plasma oxide etch process
APPLIED MATERIALS INC84 citations97
US6063233AMay 16, 2000
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC92 citations97
US6024826AFeb 15, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC100 citations97
US6524432B1Feb 25, 2003
Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density
APPLIED MATERIALS INC49 citations95
US6454898B1Sep 24, 2002
Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC43 citations95
US6514376B1Feb 4, 2003
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC22 citations92
US5990017ANov 23, 1999
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC32 citations92
US6027606AFeb 22, 2000
Center gas feed apparatus for a high density plasma reactor
APPLIED MATERIALS INC22 citations88
US11651966B2May 16, 2023
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC6 citations85
US11043387B2Jun 22, 2021
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC2 citations73