Inventor
DIMEO FRANK JR
US3 patents
Patents
3 patentsUS6254792B1Jul 3, 2001
Isotropic dry cleaning process for noble metal integrated circuit structures
ADVANCED TECH MATERIALS78 citations94
US6709610B2Mar 23, 2004
Isotropic dry cleaning process for noble metal integrated circuit structures
ADVANCED TECH MATERIALS14 citations92
US6846424B2Jan 25, 2005
Plasma-assisted dry etching of noble metal-based materials
ADVANCED TECH MATERIALS24 citations91