Inventor
GREEN MARTIN LAURENCE
US6 patents
⚠️ This page may combine multiple inventors who share the name “GREEN MARTIN LAURENCE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
3 patentsUS5814562ASep 29, 1998
Process for semiconductor device fabrication
LUCENT TECHNOLOGIES INC32 citations92
US5863843AJan 26, 1999
Wafer holder for thermal processing apparatus
LUCENT TECHNOLOGIES INC44 citations88
US5904523AMay 18, 1999
Process for device fabrication in which a layer of oxynitride is formed at low temperatures
LUCENT TECHNOLOGIES INC40 citations86
AGERE SYSTEMS INC
3 patentsUS7456064B2Nov 25, 2008
High K dielectric material and method of making a high K dielectric material
AGERE SYSTEMS INC17 citations91
US6723581B1Apr 20, 2004
Semiconductor device having a high-K gate dielectric and method of manufacture thereof
AGERE SYSTEMS INC48 citations89
US6680130B2Jan 20, 2004
High K dielectric material and method of making a high K dielectric material
AGERE SYSTEMS INC5 citations72