Inventor
THIRTHA VIVEK
US4 patents
Patents
4 patentsUS12563779B2Feb 24, 2026
Gate-all-around integrated structures having gate height reduction and dielectric capping material with shoulder portions inside gate stack
INTEL CORP0 citations60
US11594637B2Feb 28, 2023
Gate-all-around integrated circuit structures having fin stack isolation
INTEL CORP0 citations60
US11569370B2Jan 31, 2023
DEPOP using cyclic selective spacer etch
INTEL CORP0 citations60
US12414327B2Sep 9, 2025
Lateral confinement of source drain epitaxial growth in non-planar transistor for cell height scaling
INTEL CORP0 citations56