P

Inventor

ASHIHARA HIROSHI

JP57 patents
⚠️ This page may combine multiple inventors who share the name “ASHIHARA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

27 patents
US10297440B2May 21, 2019

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC345 citations98
US9536734B2Jan 3, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC7 citations84
US9349586B2May 24, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC8 citations84
US9187826B2Nov 17, 2015

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC6 citations84
US8986450B1Mar 24, 2015

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC8 citations84
US8925562B1Jan 6, 2015

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC6 citations84
US9190299B2Nov 17, 2015

Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium

HITACHI INT ELECTRIC INC7 citations83
US9728400B2Aug 8, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9728409B2Aug 8, 2017

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC4 citations73
US9698050B1Jul 4, 2017

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC3 citations73
US9558937B2Jan 31, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC4 citations73
US9508546B2Nov 29, 2016

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC3 citations73
US9587313B2Mar 7, 2017

Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC3 citations72
US9916976B2Mar 13, 2018

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC4 citations71
US9816183B2Nov 14, 2017

Substrate processing apparatus

HITACHI INT ELECTRIC INC5 citations71
US9816182B2Nov 14, 2017

Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium

HITACHI INT ELECTRIC INC6 citations69
US10361084B2Jul 23, 2019

Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system

HITACHI INT ELECTRIC INC0 citations52
US10128128B2Nov 13, 2018

Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant

HITACHI INT ELECTRIC INC1 citations52
US10115583B2Oct 30, 2018

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations52
US9831082B2Nov 28, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC1 citations52
US9812355B2Nov 7, 2017

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations52
US9673043B2Jun 6, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium

HITACHI INT ELECTRIC INC1 citations52
US9659767B2May 23, 2017

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC1 citations52
US9190281B2Nov 17, 2015

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC1 citations52
US9059089B2Jun 16, 2015

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC1 citations52
US9368358B2Jun 14, 2016

Method of manufacturing a semiconductor device

HITACHI INT ELECTRIC INC0 citations51
US9831083B2Nov 28, 2017

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC0 citations50

KOKUSAI ELECTRIC CORP

11 patents
US12198929B2Jan 14, 2025

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations63
US11854799B2Dec 26, 2023

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations63
US11170996B2Nov 9, 2021

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations63
US12387962B2Aug 12, 2025

Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US12283476B2Apr 22, 2025

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations62
US12176216B2Dec 24, 2024

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US11996311B2May 28, 2024

Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US11562905B2Jan 24, 2023

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP1 citations62
US11152215B2Oct 19, 2021

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations62
US10388530B2Aug 20, 2019

Method of manufacturing semiconductor device and substrate processing apparatus

KOKUSAI ELECTRIC CORP1 citations62
US11705326B2Jul 18, 2023

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations52

RENESAS TECH CORP

6 patents

UNITIKA LTD

2 patents

HITACHI ULSI SYS CO LTD

1 patent

RENESAS ELECTRONICS CORP

1 patent

HITACHI LTD

1 patent

MITSUI CHEMICALS INC

1 patent

Showing the top 50 of 57 patents by PatentIndex Score.