Inventor
ASHIHARA HIROSHI
JP57 patents
⚠️ This page may combine multiple inventors who share the name “ASHIHARA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
27 patentsUS10297440B2May 21, 2019
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC345 citations98
US9536734B2Jan 3, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC7 citations84
US9349586B2May 24, 2016
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC8 citations84
US9187826B2Nov 17, 2015
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC6 citations84
US8986450B1Mar 24, 2015
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC8 citations84
US8925562B1Jan 6, 2015
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC6 citations84
US9190299B2Nov 17, 2015
Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium
HITACHI INT ELECTRIC INC7 citations83
US9728400B2Aug 8, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations73
US9728409B2Aug 8, 2017
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC4 citations73
US9698050B1Jul 4, 2017
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC3 citations73
US9558937B2Jan 31, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC4 citations73
US9508546B2Nov 29, 2016
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC3 citations73
US9587313B2Mar 7, 2017
Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC3 citations72
US9916976B2Mar 13, 2018
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC4 citations71
US9816183B2Nov 14, 2017
Substrate processing apparatus
HITACHI INT ELECTRIC INC5 citations71
US9816182B2Nov 14, 2017
Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium
HITACHI INT ELECTRIC INC6 citations69
US10361084B2Jul 23, 2019
Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system
HITACHI INT ELECTRIC INC0 citations52
US10128128B2Nov 13, 2018
Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant
HITACHI INT ELECTRIC INC1 citations52
US10115583B2Oct 30, 2018
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations52
US9831082B2Nov 28, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC1 citations52
US9812355B2Nov 7, 2017
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations52
US9673043B2Jun 6, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium
HITACHI INT ELECTRIC INC1 citations52
US9659767B2May 23, 2017
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC1 citations52
US9190281B2Nov 17, 2015
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC1 citations52
US9059089B2Jun 16, 2015
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC1 citations52
US9368358B2Jun 14, 2016
Method of manufacturing a semiconductor device
HITACHI INT ELECTRIC INC0 citations51
US9831083B2Nov 28, 2017
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC0 citations50
KOKUSAI ELECTRIC CORP
11 patentsUS12198929B2Jan 14, 2025
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations63
US11854799B2Dec 26, 2023
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations63
US11170996B2Nov 9, 2021
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations63
US12387962B2Aug 12, 2025
Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations62
US12283476B2Apr 22, 2025
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations62
US12176216B2Dec 24, 2024
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations62
US11996311B2May 28, 2024
Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations62
US11562905B2Jan 24, 2023
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP1 citations62
US11152215B2Oct 19, 2021
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations62
US10388530B2Aug 20, 2019
Method of manufacturing semiconductor device and substrate processing apparatus
KOKUSAI ELECTRIC CORP1 citations62
US11705326B2Jul 18, 2023
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations52
RENESAS TECH CORP
6 patentsUS6838772B2Jan 4, 2005
Semiconductor device
RENESAS TECH CORP47 citations92
US6696357B2Feb 24, 2004
Method for manufacturing semiconductor integrated circuit devices using a conductive layer to prevent peeling between a bonding pad and an underlying insulating film
RENESAS TECH CORP20 citations92
US6764945B2Jul 20, 2004
Method of manufacturing a multilayer metallization structure with non-directional sputtering method
RENESAS TECH CORP13 citations82
US7018919B2Mar 28, 2006
Method of manufacturing a semiconductor integrated circuit device including a hole formed in an insulating film and a first conductive film formed over a bottom region and sidewalls of the hole
RENESAS TECH CORP2 citations62
US7569476B2Aug 4, 2009
Semiconductor integrated circuit device and a method of manufacturing the same
RENESAS TECH CORP0 citations51
US7095120B2Aug 22, 2006
Semiconductor integrated circuit device with a connective portion for multilevel interconnection
RENESAS TECH CORP0 citations51
UNITIKA LTD
2 patentsHITACHI ULSI SYS CO LTD
1 patentRENESAS ELECTRONICS CORP
1 patentHITACHI LTD
1 patentMITSUI CHEMICALS INC
1 patentShowing the top 50 of 57 patents by PatentIndex Score.