Inventor
BERGER KURT W
US5 patents
⚠️ This page may combine multiple inventors who share the name “BERGER KURT W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUV LLC
4 patentsUS6781135B2Aug 24, 2004
Universal EUV in-band intensity detector
EUV LLC20 citations89
US7196771B2Mar 27, 2007
Reticle stage based linear dosimeter
EUV LLC10 citations81
US6710351B2Mar 23, 2004
EUV mirror based absolute incident flux detector
EUV LLC15 citations81
US6906781B2Jun 14, 2005
Reticle stage based linear dosimeter
EUV LLC7 citations70