Inventor

KUKLI KAUPO

FI3 patents

⚠️ This page may combine multiple inventors who share the name “KUKLI KAUPO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM MICROCHEMISTRY OY

1 patent

US6632279B1Oct 14, 2003

Method for growing thin oxide films

ASM MICROCHEMISTRY OY314 citations97

ASM INT

1 patent

US6932867B2Aug 23, 2005

Method for growing thin oxide films

ASM INT11 citations72

RITALA MIKKO

1 patent

US7377976B2May 27, 2008

Method for growing thin oxide films

RITALA MIKKO4 citations67