Inventor
CONLEY WILLARD EARL
US11 patents
⚠️ This page may combine multiple inventors who share the name “CONLEY WILLARD EARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
Cymer LLC
7 patentsUS9989866B2Jun 5, 2018
Wafer-based light source parameter control
Cymer LLC18 citations91
US9835959B1Dec 5, 2017
Controlling for wafer stage vibration
Cymer LLC7 citations82
US9997888B2Jun 12, 2018
Control of a spectral feature of a pulsed light beam
Cymer LLC5 citations71
US10416566B2Sep 17, 2019
Optimization of source and bandwidth for new and existing patterning devices
Cymer LLC3 citations68
US12001144B2Jun 4, 2024
Forming multiple aerial images in a single lithography exposure pass
Cymer LLC0 citations60
US11526082B2Dec 13, 2022
Forming multiple aerial images in a single lithography exposure pass
Cymer LLC0 citations60
US10268123B2Apr 23, 2019
Wafer-based light source parameter control
Cymer LLC0 citations49
IBM
3 patentsUS5795701AAug 18, 1998
Making of microlithographic structures with an underlayer film containing a thermolyzed azide compound
IBM12 citations72
US5783361AJul 21, 1998
Microlithographic structure with an underlayer film containing a thermolyzed azide compound
IBM10 citations72
US5663036ASep 2, 1997
Microlithographic structure with an underlayer film comprising a thermolyzed azide
IBM11 citations72