Inventor

PELIKAN MAX

DE3 patents

Patents

3 patents

US11286934B2Mar 29, 2022

Vacuum pump system and method for operating a vacuum pump system

LEYBOLD GMBH3 citations64

US12140146B2Nov 12, 2024

Vacuum pump system and method for operating a vacuum pump system

LEYBOLD GMBH0 citations53

US10465686B2Nov 5, 2019

Vacuum pump system

LEYBOLD GMBH0 citations42