Inventor
LO HAN-TANG
TW5 patents
Patents
5 patentsUS9647022B2May 9, 2017
Multi-layer structure for high aspect ratio etch
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations71
US11658088B2May 23, 2023
Structures and methods for heat dissipation of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations66
US10910290B2Feb 2, 2021
Structures and methods for heat dissipation of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations66
US12230550B2Feb 18, 2025
Structures and methods for heat dissipation of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US9188547B2Nov 17, 2015
Defect inspection apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations43