Inventor
ZHAO WEIJIANG
JP6 patents
Patents
6 patentsUS7635850B2Dec 22, 2009
Ion implanter
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US10600608B1Mar 24, 2020
Ion source
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US11749501B2Sep 5, 2023
Ion implantation apparatus
NISSIN ION EQUIPMENT CO LTD0 citations58
US12272588B2Apr 8, 2025
Wafer clamping method and semiconductor manufacturing apparatus
NISSIN ION EQUIPMENT CO LTD0 citations57
US12340974B2Jun 24, 2025
Hydrogen supply device, and ion beam irradiation apparatus equipped therewith
NISSIN ION EQUIPMENT CO LTD0 citations53
US9601359B2Mar 21, 2017
Substrate holding device, semiconductor fabrication device, and substrate clamping ascertainment method
NISSIN ION EQUIPMENT CO LTD1 citations40