Inventor

ITOI SUGURU

JP3 patents

Patents

3 patents

US10470284B2Nov 5, 2019

Plasma source

NISSIN ION EQUIPMENT CO LTD1 citations57

US12340974B2Jun 24, 2025

Hydrogen supply device, and ion beam irradiation apparatus equipped therewith

NISSIN ION EQUIPMENT CO LTD0 citations53

US10199201B2Feb 5, 2019

Plasma source

NISSIN ION EQUIPMENT CO LTD0 citations47