Inventor

IWANAMI YUTA

JP2 patents

Patents

2 patents

US11749501B2Sep 5, 2023

Ion implantation apparatus

NISSIN ION EQUIPMENT CO LTD0 citations58

US12340974B2Jun 24, 2025

Hydrogen supply device, and ion beam irradiation apparatus equipped therewith

NISSIN ION EQUIPMENT CO LTD0 citations53