Inventor

SAKOWSKI HARALD

DE3 patents

⚠️ This page may combine multiple inventors who share the name “SAKOWSKI HARALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS STIFTUNG

2 patents

US5031184AJul 9, 1991

Cooling arrangement for a semiconductor pump source

ZEISS STIFTUNG21 citations79

US5268913ADec 7, 1993

Frequency-doubling solid state laser

ZEISS STIFTUNG17 citations71

ZEISS CARL SMT AG

1 patent

US7230220B2Jun 12, 2007

Method of determining optical properties and projection exposure system comprising a wavefront detection system

ZEISS CARL SMT AG6 citations58