Inventor
ENGDAHL ERIK
US4 patents
Patents
4 patentsUS6428394B1Aug 6, 2002
Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed
LAM RES CORP65 citations94
US6500056B1Dec 31, 2002
Linear reciprocating disposable belt polishing method and apparatus
LAM RES CORP22 citations89
US6645046B1Nov 11, 2003
Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers
LAM RES CORP40 citations87
US6746320B2Jun 8, 2004
Linear reciprocating disposable belt polishing method and apparatus
LAM RES CORP15 citations81