P

Inventor

WANG RUIPING

CN46 patents
⚠️ This page may combine multiple inventors who share the name “WANG RUIPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

19 patents
US6602434B1Aug 5, 2003

Process for etching oxide using hexafluorobutadiene or related fluorocarbons and manifesting a wide process window

APPLIED MATERIALS INC280 citations98
US6074959AJun 13, 2000

Method manifesting a wide process window and using hexafluoropropane or other hydrofluoropropanes to selectively etch oxide

APPLIED MATERIALS INC123 citations98
US5837058ANov 17, 1998

High temperature susceptor

APPLIED MATERIALS INC551 citations98
US6403491B1Jun 11, 2002

Etch method using a dielectric etch chamber with expanded process window

APPLIED MATERIALS INC396 citations97
US6387287B1May 14, 2002

Process for etching oxide using a hexafluorobutadiene and manifesting a wide process window

APPLIED MATERIALS INC94 citations97
US6174451B1Jan 16, 2001

Oxide etch process using hexafluorobutadiene and related unsaturated hydrofluorocarbons

APPLIED MATERIALS INC94 citations97
US6183655B1Feb 6, 2001

Tunable process for selectively etching oxide using fluoropropylene and a hydrofluorocarbon

APPLIED MATERIALS INC52 citations96
US6613691B1Sep 2, 2003

Highly selective oxide etch process using hexafluorobutadiene

APPLIED MATERIALS INC17 citations92
US6432318B1Aug 13, 2002

Dielectric etch process reducing striations and maintaining critical dimensions

APPLIED MATERIALS INC24 citations92
US6489248B2Dec 3, 2002

Method and apparatus for etch passivating and etching a substrate

APPLIED MATERIALS INC27 citations90
US6291357B1Sep 18, 2001

Method and apparatus for etching a substrate with reduced microloading

APPLIED MATERIALS INC33 citations90
US11566322B2Jan 31, 2023

Shadow mask with plasma resistant coating

APPLIED MATERIALS INC4 citations72
US6361705B1Mar 26, 2002

Plasma process for selectively etching oxide using fluoropropane or fluoropropylene

APPLIED MATERIALS INC7 citations72
US12550662B2Feb 10, 2026

Integrated process flows for hybrid bonding

APPLIED MATERIALS INC0 citations52
US11756925B2Sep 12, 2023

Methods and apparatus for vacuum processing a substrate

APPLIED MATERIALS INC0 citations52
US12237186B2Feb 25, 2025

On-board cleaning of tooling parts in hybrid bonding tool

APPLIED MATERIALS INC0 citations48
US12001193B2Jun 4, 2024

Apparatus for environmental control of dies and substrates for hybrid bonding

APPLIED MATERIALS INC0 citations47
US12547083B2Feb 10, 2026

Use of alternating layer patterns approach for effective overlay metrology in multi-stack die applications

APPLIED MATERIALS INC0 citations46
US11984335B2May 14, 2024

FOUP or cassette storage for hybrid substrate bonding system

APPLIED MATERIALS INC0 citations45

GEELY HOLDING GROUP CO LTD

6 patents

NINGBO GEELY ROYAL ENGINE COMPONENTS CO LTD

4 patents

WUXI INFIMOTION TECH CO LTD

3 patents

(unassigned)

2 patents

NAT INST OF ADVANCED IND SCIEN

2 patents

CATALYTICA ENERGY SYS INC

1 patent

CIENA CORP

1 patent

MERCK & CO INC

1 patent

YIWU GEELY AUTOMATIC TRANSMISSION CO LTD

1 patent

ARTHROSI THERAPEUTICS INC

1 patent

BEIJING REASEARCH INST OF CHEM

1 patent

DAVIS JOSH

1 patent

ZHUHAI KELITONG ELECTRONIC CO LTD

1 patent

NINGBO UMD AUTOMATIC TRANSMISSION CO LTD

1 patent

STAPLES THE OFFICE SUPERSTORE LLC

1 patent