Inventor
SU YUAN-HSIAO
TW3 patents
⚠️ This page may combine multiple inventors who share the name “SU YUAN-HSIAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
2 patentsUS10930527B2Feb 23, 2021
Method for controlling temperature of furnace in semiconductor fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10741426B2Aug 11, 2020
Method for controlling temperature of furnace in semiconductor fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45