Inventor
HEINEN BERND
DE2 patents
Patents
2 patentsUS12066321B2Aug 20, 2024
Method for determining the path of a measurement beam of an interferometric measuring device, and measuring device for interferometric measurement of an object under measurement
POLYTEC GMBH0 citations42
US11333485B2May 17, 2022
Alignment method for a beam-directing unit of an interferometric measuring device, and measuring device for carrying out an interferometric measurement by means of laser radiation
POLYTEC GMBH0 citations42