Inventor

WARD J WILLIAM

US3 patents

Patents

3 patents

US4757208AJul 12, 1988

Masked ion beam lithography system and method

HUGHES AIRCRAFT CO43 citations91

US4687940AAug 18, 1987

Hybrid focused-flood ion beam system and method

HUGHES AIRCRAFT CO46 citations91

US4563587AJan 7, 1986

Focused ion beam microfabrication column

HUGHES AIRCRAFT CO35 citations90