Inventor
CHOU L C
TW5 patents
Patents
5 patentsUS9679994B1Jun 13, 2017
High fin cut fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD18 citations84
US10714485B2Jul 14, 2020
Semiconductor device which includes Fins
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11616067B2Mar 28, 2023
Method of making semiconductor device which includes Fins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11222899B2Jan 11, 2022
Semiconductor device which includes fins and method of making same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10074657B2Sep 11, 2018
Method of manufacturing fins and semiconductor device which includes fins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52