Inventor
TROMP SIEGFRIED ALEXANDER
NL23 patents
⚠️ This page may combine multiple inventors who share the name “TROMP SIEGFRIED ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
21 patentsUS9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US9983489B2May 29, 2018
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation
ASML NETHERLANDS BV5 citations71
US10895808B2Jan 19, 2021
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV2 citations70
US10527092B2Jan 7, 2020
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations69
US10192772B2Jan 29, 2019
Substrate table and lithographic apparatus
ASML NETHERLANDS BV4 citations69
US11664264B2May 30, 2023
Lithographic apparatus, method for unloading a substrate and method for loading a substrate
ASML NETHERLANDS BV2 citations66
US11579533B2Feb 14, 2023
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations60
US12315756B2May 27, 2025
Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use
ASML NETHERLANDS BV0 citations59
US11898601B2Feb 13, 2024
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11385547B2Jul 12, 2022
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11098759B2Aug 24, 2021
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US12405539B2Sep 2, 2025
Substrate support and substrate table
ASML NETHERLANDS BV0 citations57
US12287586B2Apr 29, 2025
Stage system, lithographic apparatus, method for positioning and device manufacturing method
ASML NETHERLANDS BV0 citations55
US11860552B2Jan 2, 2024
Stage system, lithographic apparatus, method for positioning and device manufacturing method
ASML NETHERLANDS BV1 citations55
US9298104B2Mar 29, 2016
Substrate holder, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10018924B2Jul 10, 2018
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV1 citations51
US10705426B2Jul 7, 2020
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10018926B2Jul 10, 2018
Lithographic apparatus and method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10599049B2Mar 24, 2020
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations36