Inventor
WINKELS KOEN GERHARDUS
NL8 patents
Patents
8 patentsUS9442380B2Sep 13, 2016
Method and apparatus for generating radiation
ASML NETHERLANDS BV4 citations71
US10904994B2Jan 26, 2021
Supply system for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations60
US12315756B2May 27, 2025
Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use
ASML NETHERLANDS BV0 citations59
US10481498B2Nov 19, 2019
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
ASML NETHERLANDS BV1 citations57
US11914942B2Feb 27, 2024
Method for predicting resist deformation
ASML NETHERLANDS BV0 citations54
US11709988B2Jul 25, 2023
Method for predicting resist deformation
ASML NETHERLANDS BV1 citations54
US10499485B2Dec 3, 2019
Supply system for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations50
US12242204B2Mar 4, 2025
Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate
ASML NETHERLANDS BV0 citations47