Inventor
DE GROOT ANTONIUS FRANCISCUS JOHANNES
NL29 patents
⚠️ This page may combine multiple inventors who share the name “DE GROOT ANTONIUS FRANCISCUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
20 patentsUS9507275B2Nov 29, 2016
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US11874607B2Jan 16, 2024
Method for providing a wear-resistant material on a body, and composite body
ASML NETHERLANDS BV2 citations72
US10747125B2Aug 18, 2020
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations72
US10120292B2Nov 6, 2018
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US9726985B2Aug 8, 2017
Stage system and a lithographic apparatus
ASML NETHERLANDS BV4 citations71
US11231646B2Jan 25, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV1 citations70
US10191392B2Jan 29, 2019
Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator
ASML NETHERLANDS BV2 citations66
US10684558B2Jun 16, 2020
Motor assembly, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations64
US10228626B2Mar 12, 2019
Movable support and lithographic apparatus
ASML NETHERLANDS BV1 citations61
US12032301B2Jul 9, 2024
Substrate support, lithographic apparatus and loading method
ASML NETHERLANDS BV0 citations60
US11556063B2Jan 17, 2023
Substrate support, lithographic apparatus and loading method
ASML NETHERLANDS BV0 citations60
US12315756B2May 27, 2025
Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use
ASML NETHERLANDS BV0 citations59
US12117726B2Oct 15, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11754918B2Sep 12, 2023
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11003095B2May 11, 2021
Positioning system and lithographic apparatus
ASML NETHERLANDS BV1 citations58
US11156924B2Oct 26, 2021
Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations56
US9921494B2Mar 20, 2018
Lithographic apparatus comprising an actuator, and method for protecting such actuator
ASML NETHERLANDS BV0 citations50
US9389518B2Jul 12, 2016
Stage system and a lithographic apparatus
ASML NETHERLANDS BV1 citations47
US11421729B2Aug 23, 2022
Elastic guiding device, positioning device, blade and lithographic apparatus
ASML NETHERLANDS BV0 citations42
US9753381B2Sep 5, 2017
Substrate table system, lithographic apparatus and substrate table swapping method
ASML NETHERLANDS BV0 citations41