Inventor
KASHIRO TAKESHI
JP2 patents
Patents
2 patentsUS5773844AJun 30, 1998
Method of forming a polycrystalline silicon layer, a thin film transistor having the polycrystalline silicon layer, method of manufacturing the same, and a liquid crystal display device having the thin film transistor
TOSHIBA KK48 citations91
US6037017AMar 14, 2000
Method for formation of multilayer film
TOSHIBA KK82 citations90