Inventor

SYUE SEN-HONG

TW31 patents

⚠️ This page may combine multiple inventors who share the name “SYUE SEN-HONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SYUE SEN-HONG

TAIWAN SEMICONDUCTOR MFG CO LTD

Semiconductor device and method

Semiconductor device having isolation structures with different thickness and method of forming the same

Shallow trench isolation forming method and structures resulting therefrom

Transistor isolation regions and methods of forming the same

Formation method of shallow trench isolation

Semiconductor device and method of forming same

Semiconductor device and method of forming same

Method for forming semiconductor device having isolation structures with different thicknesses

Transistor isolation regions and methods of forming the same

Shallow trench isolation forming method and structures resulting therefrom

Implantation and annealing for semiconductor device

Semiconductor device and method of forming same

Method for forming semiconductor device having isolation structures with different thicknesses

Shallow trench isolation forming method and structures resulting therefrom

Implantation and annealing for semiconductor device

Semiconductor device having isolation structures with different thicknesses

Gate spacer and formation method thereof

Method for manufacturing semiconductor device including annealing treatment of inner spacer layer

Semiconductor structure and method of forming the same

Semiconductor device and method

Device and method for high pressure anneal

Method of forming a nano-FET semiconductor device

Device and method for high pressure anneal

Device and method for high pressure anneal

Method of manufacturing semiconductor devices having metal gate structure and semiconductor devices

Annealing apparatus and method of operating the same

Fin field effect transistor and method for fabricating the same

TAIWAN SEMICONDUCTOR MFG

Method of forming a shallow trench isolation structure

Mechanism of forming a trench structure

SYUE SEN HONG

Semiconductor structure and method

SYUE SEN-HONG

Wafer alignment system and method