Inventor
GOGH JAMES VAN
US4 patents
Patents
4 patentsUS6143140ANov 7, 2000
Method and apparatus to improve the side wall and bottom coverage in IMP process by using magnetic field
APPLIED MATERIALS INC99 citations97
US5907220AMay 25, 1999
Magnetron for low pressure full face erosion
APPLIED MATERIALS INC60 citations94
US5942042AAug 24, 1999
Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system
APPLIED MATERIALS INC53 citations93
US6620296B2Sep 16, 2003
Target sidewall design to reduce particle generation during magnetron sputtering
APPLIED MATERIALS INC38 citations89