Inventor
CHEN CHUAN-HUAI
TW4 patents
Patents
4 patentsUS6030508AFeb 29, 2000
Sputter etching chamber having a gas baffle with improved uniformity
TAIWAN SEMICONDUCTOR MFG24 citations89
US6942764B1Sep 13, 2005
Arc-sprayed shield for pre-sputter etching chamber
TAIWAN SEMICONDUCTOR MFG5 citations60
US6342135B1Jan 29, 2002
Sputter etching chamber with improved uniformity
TAIWAN SEMICONDUCTOR MFG3 citations60
US6436253B1Aug 20, 2002
Sputter etching chamber with improved uniformity
TAIWAN SEMICONDUCTOR MFG3 citations54