Inventor

AGGIO JASON

US2 patents

Patents

2 patents

US7456107B2Nov 25, 2008

Compositions and methods for CMP of low-k-dielectric materials

CABOT MICROELECTRONICS CORP15 citations78

US7955519B2Jun 7, 2011

Composition and method for planarizing surfaces

CABOT MICROELECTRONICS CORP0 citations50