Inventor
SWINNEN BART LUC
BE2 patents
Patents
2 patentsUS7565219B2Jul 21, 2009
Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV9 citations81
US7558643B2Jul 7, 2009
Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations60