Inventor

NAKAMURA MICHIKAZU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “NAKAMURA MICHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9296010B2Mar 29, 2016

Coating film forming apparatus

TOKYO ELECTRON LTD6 citations68

US12065732B2Aug 20, 2024

Film forming method and film forming apparatus

TOKYO ELECTRON LTD0 citations48

NAKAMURA MICHIKAZU

2 patents

US8749068B2Jun 10, 2014

Mounting method and mounting device

NAKAMURA MICHIKAZU0 citations44

US9263312B2Feb 16, 2016

Joining device and joining position adjustment method using joining device

NAKAMURA MICHIKAZU0 citations34

AKIYAMA NAOKI

1 patent

US8286853B2Oct 16, 2012

Bonding apparatus and bonding method

AKIYAMA NAOKI9 citations81