Inventor

KISHIDA YOSHIHARU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KISHIDA YOSHIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US10665430B2May 26, 2020

Gas supply system, substrate processing system and gas supply method

TOKYO ELECTRON LTD1 citations60

ISHIBASHI KIYOTAKA

1 patent

US8069704B2Dec 6, 2011

Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structure

ISHIBASHI KIYOTAKA2 citations55