Inventor

NISHIJIMA MASUMI

JP3 patents

Patents

3 patents

US11911806B2Feb 27, 2024

Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium

EBARA CORP0 citations56

US10157762B2Dec 18, 2018

Substrate processing apparatus and substrate presence or absence checking method and program

EBARA CORP0 citations49

US11817311B2Nov 14, 2023

Substrate cleaning method and substrate cleaning apparatus

EBARA CORP0 citations48