Inventor
LIEN WEN-CHENG
TW8 patents
⚠️ This page may combine multiple inventors who share the name “LIEN WEN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS11398393B2Jul 26, 2022
Vapor shield replacement system and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US11823919B2Nov 21, 2023
Multi-shield plate and control system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10811285B2Oct 20, 2020
Vapor shield replacement system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9687885B2Jun 27, 2017
Multi-cycle wafer cleaning method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40