Inventor
JOHNSON KENNETH C
67 patents
⚠️ This page may combine multiple inventors who share the name “JOHNSON KENNETH C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JOHNSON KENNETH C
12 patentsUS5169456ADec 8, 1992
Two-axis tracking solar collector mechanism
JOHNSON KENNETH C98 citations96
US5161057ANov 3, 1992
Dispersion-compensated fresnel lens
JOHNSON KENNETH C84 citations96
US4968355ANov 6, 1990
Two-axis tracking solar collector mechanism
JOHNSON KENNETH C110 citations96
US9612370B1Apr 4, 2017
EUV light source with spectral purity filter and power recycling
JOHNSON KENNETH C30 citations94
US9188874B1Nov 17, 2015
Spot-array imaging system for maskless lithography and parallel confocal microscopy
JOHNSON KENNETH C52 citations94
US4022100AMay 10, 1977
Fastener
JOHNSON KENNETH C32 citations93
US8994920B1Mar 31, 2015
Optical systems and methods for absorbance modulation
JOHNSON KENNETH C14 citations84
US7116405B2Oct 3, 2006
Maskless, microlens EUV lithography system with grazing-incidence illumination optics
JOHNSON KENNETH C13 citations84
US4765726AAug 23, 1988
Fresnel scroll solar tracking device
JOHNSON KENNETH C24 citations82
US4337992AJul 6, 1982
Hologram movie projection apparatus
JOHNSON KENNETH C11 citations74
US8687277B2Apr 1, 2014
Stacked-grating light modulator
JOHNSON KENNETH C5 citations73
US9097983B2Aug 4, 2015
Scanned-spot-array EUV lithography system
JOHNSON KENNETH C2 citations63
THERMA WAVE INC
8 patentsUS6819426B2Nov 16, 2004
Overlay alignment metrology using diffraction gratings
THERMA WAVE INC373 citations99
US6753961B1Jun 22, 2004
Spectroscopic ellipsometer without rotating components
THERMA WAVE INC154 citations99
US6768967B2Jul 27, 2004
Database interpolation method for optical measurement of diffractive microstructures
THERMA WAVE INC110 citations98
US6947135B2Sep 20, 2005
Reduced multicubic database interpolation method for optical measurement of diffractive microstructures
THERMA WAVE INC63 citations96
US6806105B2Oct 19, 2004
Method of measuring meso-scale structures on wafers
THERMA WAVE INC49 citations96
US6623991B2Sep 23, 2003
Method of measuring meso-scale structures on wafers
THERMA WAVE INC57 citations96
US7069153B2Jun 27, 2006
CD metrology method
THERMA WAVE INC16 citations84
US6850333B1Feb 1, 2005
Optimized aperture shape for optical CD/profile metrology
THERMA WAVE INC16 citations84
(unassigned)
7 patentsUS6498685B1Dec 24, 2002
Maskless, microlens EUV lithography system
252 citations99
US6177980B1Jan 23, 2001
High-throughput, maskless lithography system
570 citations99
US6133986AOct 17, 2000
Microlens scanner for microlithography and wide-field confocal microscopy
901 citations99
US6734968B1May 11, 2004
System for analyzing surface characteristics with self-calibrating capability
110 citations98
US6628390B1Sep 30, 2003
Wafer alignment sensor using a phase-shifted microlens array
83 citations98
US6424404B1Jul 23, 2002
Multi-stage microlens array
94 citations98
US6489984B1Dec 3, 2002
Pixel cross talk suppression in digital microprinters
59 citations96
LITTELL INTERNATIONAL INC
6 patentsUS6070781AJun 6, 2000
System for bringing the joint edges of sheet material into butting relationship for welding
LITTELL INTERNATIONAL INC41 citations95
US5932117AAug 3, 1999
Clamping system for sheet material in a welding system
LITTELL INTERNATIONAL INC21 citations92
US5814786ASep 29, 1998
System and method for laser butt-welding
LITTELL INTERNATIONAL INC25 citations92
US6161460ADec 19, 2000
Bearing assembly for shear
LITTELL INTERNATIONAL INC12 citations73
US5951889ASep 14, 1999
System and method for laser welding
LITTELL INTERNATIONAL INC10 citations73
US5926967AJul 27, 1999
System for gauging the position of joint edges for welding
LITTELL INTERNATIONAL INC5 citations73
LITTELL MACHINE CO F J
5 patentsUS4047416ASep 13, 1977
Uncoiling and straightening apparatus for strip material
LITTELL MACHINE CO F J18 citations82
US4222256ASep 16, 1980
Straightener with individually removable roll and pivoted bearing housing and roll design
LITTELL MACHINE CO F J11 citations74
US4134334AJan 16, 1979
Automated lock device for press feed belt drives
LITTELL MACHINE CO F J11 citations74
US4029251AJun 14, 1977
Roll feed with modular roll lifter mechanism
LITTELL MACHINE CO F J14 citations74
US4559900ADec 24, 1985
Device for coating strip material
LITTELL MACHINE CO F J11 citations70
TOKYO ELECTRON LTD
4 patentsUS7042569B2May 9, 2006
Overlay alignment metrology using diffraction gratings
TOKYO ELECTRON LTD70 citations98
US7043397B2May 9, 2006
Reduced multicubic database interpolation method for optical measurement of diffractive microstructures
TOKYO ELECTRON LTD26 citations93
US7099081B2Aug 29, 2006
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
TOKYO ELECTRON LTD10 citations74
US7069182B2Jun 27, 2006
Database interpolation method for optical measurement of diffractive microstructures
TOKYO ELECTRON LTD6 citations74
KLA TENCOR CORP
2 patentsSENSYS INSTR
1 patentHUGHES AIRCRAFT CO
1 patentCLARK EQUIPMENT CO
1 patentSENSYS INSTR CORP
1 patentSPERRY RAND CORP
1 patentIEC ELECTRONICS CORP
1 patentShowing the top 50 of 67 patents by PatentIndex Score.