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Inventor
CHANG YIA-CHUNG
US
5 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YIA-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
3 patents
US7038850B2
May 2, 2006
CD metrology analysis using green's function
THERMA WAVE INC
67 citations
97
US6867866B1
Mar 15, 2005
CD metrology analysis using green's function
THERMA WAVE INC
54 citations
95
US7233390B2
Jun 19, 2007
Scatterometry for samples with non-uniform edges
THERMA WAVE INC
10 citations
83
CHANG YIA-CHUNG
1 patent
US8937767B2
Jan 20, 2015
Auto-stereoscopic display and three-dimensional imaging double-sided mirror array
CHANG YIA-CHUNG
3 citations
52
ACADEMIA SINICA
1 patent
US7972878B2
Jul 5, 2011
Quantum dot memory
ACADEMIA SINICA
0 citations
40