Inventor
LARSON DEAN
US3 patents
Patents
3 patentsUS10651015B2May 12, 2020
Variable depth edge ring for etch uniformity control
LAM RES CORP7 citations80
US9859145B2Jan 2, 2018
Cooled pin lifter paddle for semiconductor substrate processing apparatus
LAM RES CORP2 citations69
US11342163B2May 24, 2022
Variable depth edge ring for etch uniformity control
LAM RES CORP0 citations58