Inventor
GARDINER JAMES R
5 patents
Patents
5 patentsUS4354309AOct 19, 1982
Method of manufacturing a metal-insulator-semiconductor device utilizing a graded deposition of polycrystalline silicon
IBM63 citations94
US4249968AFeb 10, 1981
Method of manufacturing a metal-insulator-semiconductor utilizing a multiple stage deposition of polycrystalline layers
IBM43 citations91
US4341009AJul 27, 1982
Method for making an electrical contact to a silicon substrate through a relatively thin layer of silicon dioxide on the surface of the substrate
IBM32 citations89
US4394406AJul 19, 1983
Double polysilicon contact structure and process
IBM18 citations72
US4437108AMar 13, 1984
Double polysilicon contact structure
IBM1 citations50