Inventor
YAU LEO D
US3 patents
Patents
3 patentsUS5212910AMay 25, 1993
Composite polishing pad for semiconductor process
INTEL CORP349 citations95
US4536947AAug 27, 1985
CMOS process for fabricating integrated circuits, particularly dynamic memory cells with storage capacitors
INTEL CORP43 citations89
US4505026AMar 19, 1985
CMOS Process for fabricating integrated circuits, particularly dynamic memory cells
INTEL CORP18 citations71