Inventor
GUARNIERI CHARLES R
7 patents
Patents
7 patentsUS5280154AJan 18, 1994
Radio frequency induction plasma processing system utilizing a uniform field coil
IBM236 citations98
US4664769AMay 12, 1987
Photoelectric enhanced plasma glow discharge system and method including radiation means
IBM518 citations98
US5298720AMar 29, 1994
Method and apparatus for contamination control in processing apparatus containing voltage driven electrode
IBM53 citations95
US5225926AJul 6, 1993
Durable optical elements fabricated from free standing polycrystalline diamond and non-hydrogenated amorphous diamond like carbon (dlc) thin films
IBM98 citations94
US5179264AJan 12, 1993
Solid state microwave powered material and plasma processing systems
IBM73 citations92
US5206213AApr 27, 1993
Method of preparing oriented, polycrystalline superconducting ceramic oxides
IBM20 citations78
US4147667AApr 3, 1979
Photoconductor for GaAs laser addressed devices
IBM26 citations78