Inventor

TAJIMA MICHIO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “TAJIMA MICHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AGENCY IND SCIENCE TECHN

1 patent

US4492871AJan 8, 1985

Method for determining impurities in epitaxial silicon crystals

AGENCY IND SCIENCE TECHN13 citations64

JAPAN AEROSPACE EXPLORATION

1 patent

US7947967B2May 24, 2011

Method for evaluating a semiconductor substrate

JAPAN AEROSPACE EXPLORATION1 citations47